Alchimer

Press releases

Alchimer Introduces ALC-S200 for Ultra-thin electrografted ( eG™ ) Seed Process

First Wet Cu Seed Process for Semiconductor Industry

Massy, France, June 5th 2006: Alchimer introduces the ALC-S200 product at the International Interconnect Technology Conference (IITC), being held June 5-7 in San Francisco. ALC-S200 is part of the eG™ Seed product family, based on Alchimer’s breakthrough proprietary technology called electrografting (eG™ ). eG™ Seed is a novel electrochemical process providing excellent conformity to the thin copper seed layers in the 5 to 20 nanometer range, a roadblock for the dry vacuum processes in use for the past 25 years.

ALC-S200 is a mild acidic aqueous copper electrolyte solution that enables the deposition of ultra thin, homogeneous, uniform, adherent and conformal layers; it is specifically formulated for advanced interconnect seeding on widely adopted metal barriers (Ta, TaN, TiN), using Alchimer’s eG™ technology.

ALC-S200 has the unique ability to enable ultra-thin and conformal copper seed layers deposition in a wet approach and is fully compatible with commercial copper electroplating blend waste stream and tool sets.

The ALC-S200 is part of Alchimer’s wet interconnect wiring concept that combines enabling performances and cost-effectiveness compared to high-cost vapour phase deposition techniques.
Integration of eG™ Seed with industry standard ECD Copper plating enables productivity improvements and overall COO reduction for the advanced metallization module.

In January Alchimer's eG™ electrografting technology was accepted by the International Technology Roadmap for Semiconductors (ITRS), 2005 edition as one of the leading solutions for copper seed layer processing for ultra-large scale integration (ULSI) in semiconductor manufacturing.

eG™ Seed is presently under evaluation as alternative solution for 45nm technology node and beyond with major IDM and foundry players.

Visit Booth 110 at IITC for more information on the Alchimer eG™ Seed process or visit alchimer's web site at www.alchimer.com.