Alchimer’s breakthrough technology, Electrografting (eG™), is an electrochemical-based process using specific organic precursors enabling ultra-conformal growth deposition of dielectric and conductive nanometric films from aqueous chemistries.
Using industry-standard electroplating equipment, the substrate surface is exposed to liquid chemical precursors of the desired film. Electrons from the biased surface serve as “bonding seeds” for a large number of precursor molecules. In this way, the process initiates the growth of the film, which is truly “grafted” onto the surface, with the formation of a covalent chemical bond between the first seeded precursor and the surface, hence the term Electografting, or eG™.
eG™ gives you nanometer scale thickness control from 2 to 500nm, unrivalled uniformity at wafer scale and conformal coating on patterned surfaces, even at very high aspect ratios (18:1).
To download detailed technical description of eG™ and its capabilities, please register.
